Thermodynamic Calculations for the Chemical Vapor Deposition of Silicon Nitride
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1983.tb10090.x/fullpdf
Reference73 articles.
1. The preparation, characterization and applications of silicon nitride thin films
2. Internal Phase Changes in Dense Si3N4 Associated with High-Temperature Oxidation
3. Preparation of High-Density Si3N4 by a Gas-Pressure Sintering Process
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