Surface Defects in Polished Silicon Studied by Cross-Sectional Transmission Electron Microscopy
Author:
Publisher
Wiley
Subject
Materials Chemistry,Ceramics and Composites
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1989.tb09696.x/fullpdf
Reference21 articles.
1. Silicon as a mechanical material
2. Fracture testing of silicon microelementsinsituin a scanning electron microscope
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