Thermodynamic and Experimental Study of High-Purity Aluminum Nitride Formation from Aluminum Chloride by Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Thermodynamic and Experimental Study of High-Purity Aluminum Nitride Formation from Aluminum Chloride by Chemical Vapor Deposition

Published:1989-10 Issue:10 Volume:72 Page:1804-1810
ISSN:0002-7820
Container-title:Journal of the American Ceramic Society
language:en
Short-container-title:J American Ceramic Society

Author:

Nickel Klaus G.,Riedel Ralf,Petzow Gunter

Publisher

Wiley

Subject

Materials Chemistry,Ceramics and Composites

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1111/j.1151-2916.1989.tb05982.x/fullpdf

Reference15 articles.

1. Sintering of Aluminium Nitride with Low Oxide Addition

2. 4K. Shinozaki, N. Iwase, and A. Tsuge , "High Thermal Conductive Aluminum Nitride (AlN) Substrate,"Tech. Pap. Assoc. Finish. Processes SME [fer.] FC, 16 22 , (1986 ).

3. 5M. W. Chase, C. A. Davis, J. R. Downey, D. J. Fridup, R. A. McDonald, and A. N. Syverud , "JANAF Thermochemical Tables ," 3d ed. , J. Phys. Chem. Ref. Data , 14 (1985 ).

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