Electroplating Technology of Platinum Catalyst for MEMS Hydrogen Gas Sensor
Author:
Affiliation:
1. Graduate School of Information Production and Systems, Waseda University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/136/12/136_511/_pdf
Reference10 articles.
1. (1) W. Shin, M. Nishibori, and I. Matsubara : “Thermoelectric hydrogen gas sensor”, Synthesiology, Vol. 4, No. 2, pp. 92-99 (2011) (in Japanese)
2. (2) K. Fukui : “Now and Future in Hydrogen Gas Sensors”, J. Surf. Finish. Soc. Jpn., Vol. 57, No. 4, pp. 244-249 (2006) (in Japanese)
3. (3) I. Takahashi : “Catalytic Combustion Type Hydrogen Gas Sensor”, J. Surf. Finish. Soc. Jpn., Vol. 57, No. 4, pp. 267-270 (2006) (in Japanese)
4. (4) W. Shin, M. Matsumiya, N. Izu, and N. Murayama : “Hydrogen-selective thermoelectric gas sensor”, Sensors and Actuators B, Vol. 93, pp. 304-308 (2003)
5. (5) D. Yamazaki, L. Zhang, J. Pawlat, and T. Ueda : “Thermo-Resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques”, IEEJ Trans. SM, Vol. 128, No. 9, pp. 347-351 (2008)
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1. Development and research of a technology for producing a low-dimensional porous platinum-based catalyst by thermal evaporation in vacuum on an ion-exchange polymer membrane of a hydrogen generator electrolytic cell;Journal of Physics: Conference Series;2020-12-01
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