Monolithic Integration of BST Thin Film Varactors and Au Electroplated Thick Film Inductors above IC-Reference-Cited by-同舟云学术

Monolithic Integration of BST Thin Film Varactors and Au Electroplated Thick Film Inductors above IC

Published:2015 Issue:8 Volume:135 Page:323-329
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Asano Sho¹,Pokharel Ramesh²,Anand Awinash²,Hirano Hideki¹,Tanaka Shuji¹

Affiliation:

1. Graduate School of Engineering, Tohoku University

2. Graduate School of Information Science and Electrical Engineering, Kyushu University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/135/8/135_323/_pdf

Reference18 articles.

1. (1) X. Zhu, J. Zhu, S. Zhou, Z. Liu, N. Ming, S. Lu, H. L.-W. Chan, and C.-L. Choy : “Recent progress of (Ba,Sr)TiO₃ thin films for tunable microwave devices”, J. Electron. Mater., Vol. 32, No. 10, pp. 1125-1134 (2003)

2. (2) P. Bao, T. J. Jackson, X. Wang, and M. J. Lancaster : “Barium strontium titanate thin film varactors for room-temperature microwave device applications”, J. Phys. D. Appl. Phys., Vol. 41, No. 6, p. 063001 (2008)

3. (3) G. Subramanyam, M. W. Cole, N. X. Sun, T. S. Kalkur, N. M. Sbrockey, G. S. Tompa, X. Guo, C. Chen, S. P. Alpay, G. a. Rossetti, K. Dayal, L.-Q. Chen, and D. G. Schlom : “Challenges and opportunities for multi-functional oxide thin films for voltage tunable radio frequency/microwave components”, J. Appl. Phys., Vol. 114, No. 19, p. 191301 (2013)

4. (4) S. Hong, H. Bak, I. An, and O. K. Kim : “Microstructural and electrical properties of Ba_xSr_1-xTiO₃ thin films on various electrodes”, J. Appl. Phys., Vol. 39, No. 4A, pp. 1796-1800 (2000)

5. (5) N. Moriwaki, I. P. Koutsaroff, M. Kadota, M. Esashi, and S. Tanaka : “Integration process of variable capacitors using barium strontium titanate thin film deposited at high temperature”, IEICE Trans. Fundamentals (Japanese Edition), Vol. 96, No. 6, pp. 342-350 (2013) (in Japanese)