Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing
Author:
Affiliation:
1. Graduate School of Science and Technology, Niigata University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/139/11/139_375/_pdf
Reference6 articles.
1. (3) R. S. Dahiya, G. Metta, M. Valle, and G. Sandini : “Tactile Sensing-From Human to Humanoids”, IEEE Transactions on Robotics, Vol. 26, No. 1, p. 10 (2010)
2. (4) Z. Kappassov, J.-A. Corrales, and V. Perdereau : “Tactile sensing in dexterous robot hands ― Review”, Rob. Auton. Syst., Vol. 74, pp. 195-220 (2015)
3. (5) K. Yamashita, Y. Yang, T. Nishimoto, K. Furukawa, and M. Noda : “Vector Tactile Sensing by a Single Sensor Element of Vibratory Microcantilever Based on Multimode Resonant Frequency Shift”, Procedia Engineering, Vol. 25, pp. 615-618 (2012)
4. (6) T. Kohno, T. Abe, M. Sohgawa, M. Okuyama, and H. Noma : “Characterization of BiFeO3 thin film for tactile sensor using microcantilevers with piezoelectric capacitor and strain-gauge”, 2015 IEEE SENSORS, pp. 1192-1195, Busan, South Korea (2015)
5. (7) R. Araki, T. Abe, H. Noma, and M. Sohgawa : “Miniaturization and high-density arrangement of microcantilevers in proximity and tactile sensor for dexterous gripping control”, Micromachines, Vol. 9, No. 6, p. 301 (2018)
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