An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation
Author:
Affiliation:
1. Institute of Industrial Science, The University of Tokyo
2. Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency
3. Research Center for Advanced Science and Technology, The University of Tokyo
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://www.jstage.jst.go.jp/article/ieejsmas/132/1/132_1_1/_pdf
Reference19 articles.
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2. Modeling and characterization of comb-actuated resonant microscanners
3. (3) H. Schenk, T. Sandner, C. Drabe, M. Scholles, K. Frommhagen, C. Gerwig, and H. Lakner : “Ultra Compact Laser Based Projectors and Imagers”, in J. A. Jacho (Ed.): Human-Computer Interaction, Part III, HCI International 2009, pp. 501-510 (2009)
4. (4) M. Mita, T. Mizuno, M. Ataka, and H. Toshiyoshi : “A 2-axis MEMS Scanner for the Landing Laser Radar of the Space Explorer”, in Proc. IEEE Int. Conf. on Optical MEMS and Nanophotonics, Sapporo Convention Center, Sapporo, Japan, pp. 111-112 (2010-8)
5. Two-Dimensional MEMS Scanner for Dual-Axes Confocal Microscopy
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