Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope

Author:

Dau Van Thanh1,Dinh Thien Xuan1,Dao Dzung Viet1,Sugiyama Susumu1

Affiliation:

1. Ritsumeikan University, Biwako-Kusatsu Campus

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference7 articles.

1. (1) N. Yazdi, F. Ayazi, and K. Najafi : Micromachined inerial sensors, Proc. IEEE86 (98) pp. 1640-1659

2. (2) K Saito, G. Komatsu, and K. Kato : “An analysis of fluid behavior on gas anglar rate sensor”, JSME Memoirs C 67-661(in Japanese) pp. 135-140

3. (3) J. Zhou, G. Yan, Y. Zhu, Z. Xiao, and J. Fan : “Design and Fabrication of a microfluid angular rate sensor”, 18th IEEE International Conference on Micro electro mechanical systems (MEMS), pp. 363-366 (2005)

4. Development of a dual-axis thermal convective gas gyroscope

5. (5) D. V. Dao, V. T. Dau, T. Shiozawa, H. Kumagai, and S. Sugiyama : “A Dual Axis Gas Gyroscope Based On Convective and Thermo-Resistive Effects in Silicon with Low Thermal-Induced Stress Sensing Element”, Proceeding of the 19th IEEE MEMS, pp. 594-597 (2006)

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