Affiliation:
1. Ritsumeikan University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference2 articles.
1. (1) T. Yasuda, I. Shimoyama, and H. Miura: “CMOS Drivable Electrostatic Microactuator with Large Deflection,”, Proceedings IEEE MEMS, pp. 90-95 (1997)
2. (2) M.S. Rodgers, J.J. Sniegowski, J.J. Allen, S.L. Miller, J.H. Smith, and P.J. McWhorter: “Intricate Mechanisms-on-a-chip Enabled by 5-level Surface Micromachining”, Transducers ’99, pp. 990-993 (1999)
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