A Design Method for Electret MEMS Devices using Electrical Circuit Simulator
Author:
Affiliation:
1. RCAST, University of Tokyo
2. Research Institute of Electronics, Shizuoka University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/134/11/134_357/_pdf
Reference19 articles.
1. (1) “TSsensor Summits for Trillion Sensor Roadmap”, URL available at http://www.tsensorssummit.org/Resources/Why%20TSensors%20Roadmap.pdf
2. (2) Y. Suzuki: “Recent Progress in MEMS Electret Generator for Energy Harvesting”, IEEJ Trans. EEE, Vol. 6, No. 2, pp. 101-111 (2011)
3. (3) R. Elfrink, T. M. Kamel, M. Goedbloed, S. Matova, D. Hohlfeld, Y. van Andel, and R. van Schaijk: “Vibration energy harvesting with aluminum nitride-based piezoelectric devices”, J. Micromech. Microeng., Vol. 19, No. 9, p. 094005 (2009)
4. (4) S. P. Beeby, R. N. Torah, M. J. Tudor, P. Glynne-Jones, T. O'Donnell, C. R. Saha, and S. Roy: “A micro electromagnetic generator for vibration energy harvesting”, J. Micromech. Microeng., Vol. 17, No. 7, p. 1257 (2007)
5. (5) Y. Suzuki, D. Miki, M. Edamoto, and M Honzumi: “A MEMS electret generator with electrostatic levitation for vibration-driven energy-harvesting applications”, J. Micromech. Microeng., Vol. 20, p. 104002 (2020)
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