Affiliation:
1. Ritsumeikan University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference7 articles.
1. (1) H. Takao, I. Makoto, and S. Kazuaki : “A Pneumatically Actuated Silicon Microvalve and its Application to Functional Fluidic Integrated Circuits”, Proc. of Transducers'01, pp. 946-949 (2001)
2. A pneumatically actuated full in-channel microvalve with MOSFET-like function in fluid channel networks
3. (3) H. Takao and M. Ishida : “Analysis and Experimental Verification of Micro Fluidic Integrated Circuits Using Analogous Relationship between Pneumatic Microvalve and MOSFET”, MEMS2003, pp. 185-188
4. (4) M. Terada, M. Tanaka, and S. Konishi : “MEMS based Acoustic FET as Active Components for Integrated Functional Acoustic Systems”, MEMS2003, pp. 181-184 (2003)
5. Estimation of an open-loop compact adaptive passive noise control system with microstructures