1. (1) T. Takeda, et al. : “ITS Symposium 2002”, pp. 113-118 (2002)
2. (2) D. Lapadatu, et al. : “MEMS2001”, pp. 34-37 (2001)
3. (3) R. Nagato, H. Hosaka, and K. Sakamoto : “A TWO-DOF INCLINATION SENSOR BASED ON A SHELLFISH'S BALANCING ORGAN”, Transducers '99, pp. 1554-1557 (1999)
4. (4) S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, and H. Sandmaier : “Micromachined inclinometer with high sensitivity and very good stability”, Transducers '01, pp. 1488-1491 (2001)
5. (5) R. A. Yotter, R. R. Baxter, S. Ohno, S. D. Hawley, and D. M. Wilson : “ON A MICROMACHINED FLUIDIC INCLINOMETER”, Transducers '03, pp. 1279-1282 (2003)