The Application of a Cantilever-based Strain Sensor to Air Pressure Measurement in Air Blowing Process
Author:
Affiliation:
1. Yamagata Research Institute of Technology
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/137/3/137_84/_pdf
Reference5 articles.
1. (1) A. Shimoyama and K. Shida : “Measurement of Temperature and Wind Velocity Based on Multi-Functional Measurement using a Thermistor”, IEEJ Trans. SM, Vol. 127, No. 4, pp. 247-252 (2007) (in Japanese)
2. (2) S. Yasaka, S. Ohya, M. Mitsuhashi, S. Kaneko, T. Ito, Y. Kanno, Y. Aikyo, S. Komuro, K. Ohbayashi, and M. Kimura : “Thermal Anemometer Using a Micro-Air-Bridge Heater with Chip Scale Wind Tunnel”, IEEJ Trans. SM, Vol. 127, No. 4, pp. 241-246 (2007) (in Japanese)
3. (3) Y.-H. Wang, C.-Y. Lee, and C.-M. Chiang : “A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure”, Sensors, Vol. 7, No. 10, pp. 2389-2401 (2007)
4. (4) A. Agoston, B. Jakoby, and F. Keplinger : “Evaluation of a vibrating micromachined cantilever sensor for measuring the viscosity of complex organic liquids”, Sensors and Actuators A: Physical, Vol. 123-124, No. 1, pp. 82-86 (2005)
5. (5) Y. Lee, G. Lim, and W. Moon : “A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation”, Microsystem Technologies, Vol. 13, No. 5, pp. 563-567 (2007)
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