Development of MEMS Motor using 3D Printer based on Light Radiation Pressure

Author:

Sano Hiroto1,Arai Yasuhiko1

Affiliation:

1. Kansai University Faculty of Engineering Science

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference4 articles.

1. (1) Y.-C. Tai and R. S. Muller : “IC-processed electrostatic synchronous micromotors”, Sensors & Actuators, Vol. 20, No. 1-2, pp. 49-56 (1989)

2. (2) H. Fujita and A. Omodaka : “Electrostatic Micro Actuators”, Technical Digest of the 7th Sensor Symposium, pp. 169-172 (1988)

3. (5) A. Ashkin : “Acceleration and trapping of particles by radiation pressue”, Phys. Rev. Lett., Vol. 24, pp. 156-159 (1970)

4. (7) D. Shimizu and Y. Arai : “Development of rotor with optical actuator using the silicon-fabrication”, International symposium on optomechtronics technology 2016, p. 18 (2016)

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