Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films-Reference-Cited by-同舟云学术

Development of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films

Published:2015 Issue:5 Volume:135 Page:145-151
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Tanaka Tsunehisa¹,Murakami Shuichi¹,Uno Mayumi¹,Yamashita Kaoru²

Affiliation:

1. Technology Research Institute of Osaka Prefecture

2. Graduate School of Science and Technology, Kyoto Institute of Technology

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/135/5/135_145/_pdf

Reference11 articles.

1. (1) J. Eguchi and K. Ozaki : “Development of the Autonomous Mobile Robot for Target-Searching in Urban Areas in the Tsukuba Challenge 2013”, Journal of Robotics and Mechatronics, Vol. 26, No. 2, pp. 166-176 (2014)

2. (4) K. Yamashita, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, and Y. Suzuki : “Arrayed ultrasonic microsensors with high-directivity for in -air use using PZT thin film on silicon diaphragm”, Sensors and Actuators A, Phs. 97-98C, 1-3, pp. 302-307 (2002)

3. (5) S. Lee, T. Tanaka, and K. Inoue : “Residual stress influence on the sensitivity of ultrasonic sensor having composite membrane structure”, Sensors and Actuators A, Vol. 125, pp. 242-248 (2006)

4. (6) T. Tanaka, S. Lee, M. Uno, K. Inoue, S. Aoyagi, K. Yamashita, and M. Okuyama : “Improvement of Ultrasonic Micro Array Sensor Using the Amorphous Fluorocarbon Polymer Film”, IEE Japan, Vol. 127-E, No. 1, pp. 7-13 (2007) (in Japanese)

5. (7) S. Sugiyama, M. Takigawa, and I. Igarashi : “Integrated Piezoresistive Pressure Sensor with Both Voltage and Frequency Output”, Sensors and Actuators A, Vol. 4, pp. 113-120 (1983)

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