Fabrication of Micro Lens Optical Scanner on SOI Wafer

Author:

Saruta Kunihiko1,Fujita Hiroyuki1,Toshiyoshi Hiroshi1

Affiliation:

1. Institute of Industrial Science, University of Tokyo

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference6 articles.

1. (1) V. Aksyuk: “Beam-Steering Micromirrors for Optical Telecommunications”, Proc. IEEE/LEOS Int. Conf. on Optical MEMS 2001, Sept. pp. 25-28 (2001)

2. (2) J. Doscher: “Using MEMS Technology in Optical Switching”, http://www.analog.com/library/techArticles/mems/techOp.html

3. (3) R. Sawada, E. Higurashi, A. Shimizu, and T. Maruno: “Single Crystalline Mirror Actuated Electrostatically by Terraced Electrodes With High-Aspect Ratio Torsion Spring”, Proc. IEEE/LEOS Int. Conf. on Optical MEMS 2001, Sept. pp. 25-28 (2001)

4. (4) D. Hah, S. Huang, H. Nguyen, H. Chang, H. Toshiyoshi, M. C. Wu: “A Low Voltage, Large Scan Angle MEMS Micromirror Array with Hidden Vertical Comb-Drive Actuators for WDM Routers”, OFC, pp. 92-93 (2002)

5. (5) H. Toshiyoshi, Guo-Dung John Su, Jason LaCosse, and Ming C. Wu: “A Surface Micromachined Optical Scanner Array using Photoresist Lenses Fabricated by a Thermal Reflow Process”, (to be published in IEEE JLT 2003, July).

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