Heterogeneous Bonding Between Cyclo-olefin Polymer (COP) and Glass-like Substrate by Newly Developed Water Vapor Assisted Plasma, Aqua Plasma Cleaner
Author:
Affiliation:
1. Samco Inc.
2. SYSMEX CORPORATION
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/138/8/138_358/_pdf
Reference29 articles.
1. (1) Y. Taniguchi, Y. J. Kim, M. Hagioi, Y. Taguchi, and H. Sugimura : “Photo-Activation Bonding of Cyclo-Olefin Polymer Plates: Evaluation of the Bonding Strength and Application to Micro-Fluidic Chips”, J. Surf. Finish. Soc. Japan, Vol. 65, No. 5, pp. 234-239 (2014) (in Japanese)
2. (2) S. Uehara, T. Kawabe, P. Wood, and O. Tsuji : “UV/ozone Surface Modification for Long-term Stable Hydrophilic Surface of Polymer Microfluidic Devices”, MRS Adv., Vol. 1, No. 11, pp. 743-748 (2016)
3. (3) J. Zhou, A. V. Ellis, and N. H. Voelcker : “Recent developments in PDMS surface modification for microfluidic devices”, Electrophoresis, Vol. 31, No. 1, pp. 2-16 (2010)
4. (4) H. Shinohara, J. Mizuno, and S. Shoji : “Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer”, Sensors Actuators A. Phys., Vol. 165, pp. 124-131 (2011)
5. (7) H. Nagata, A. Nakamura, and H. Sugimura : “Japan patent JP2013-103456A” (in Japanese)
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