Fabrication of Tri-Axial MEMS Tactile Sensor for Minimally Invasive Medical Application using Wafer-Level Packaging-Reference-Cited by-同舟云学术

Fabrication of Tri-Axial MEMS Tactile Sensor for Minimally Invasive Medical Application using Wafer-Level Packaging

Published:2023-01-01 Issue:1 Volume:143 Page:13-18
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Imanishi Tomoya¹,Miyamoto Keiju¹,Higashi Shuntaro¹,Oki Shunsuke¹,Uesugi Akio¹,Sugano Koji¹,Aono Takanori¹,Isono Yoshitada¹

Affiliation:

1. Department of Mechanical Engineering, Graduate School of Engineering, Kobe University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/143/1/143_13/_pdf

Reference11 articles.

1. (1) L. W. Johnson, E. C. Lozner, S. Johnson, R. Krone, A. D. Pichard, G. W. Vetrovec, and T. J. Noto : “Coronary arteriography 1984-1987: A report of the registry of the society for cardiac angiography and interventions. I. Results and complications”, Catheterization and Cardiovascular Diagnosis, Vol. 17, No. 1, pp. 5-10 (1989)

2. (2) H. Yokoyama, T. Kanashima, M. Okuyama, T. Abe, H. Noma, T. Azuma, and M. Sohgawa : “Investigation for Sensing of Proximity and Tactile Information Using a Single MEMS Sensor”, IEEJ Trans. SM, Vol. 134, pp. 229-234 (2014)

3. (3) H. Takahashi, A. Nakai, N. Thanh-vinh, K. Matsumoto, and I. Shimoyama : “A triaxial tactile sensor without crosstalk using pairs of piezoresistive beams with sidewall doping”, Sensors and Actuators A, Vol. 199, pp. 43-48 (2013)

4. (4) B. Herold, M. Geyer, and C. J. Studman : “Fruit contact pressure distributions equipment”, Computers and Electronics in Agriculture, Vol. 32, pp. 167-179 (2001)

5. (5) P. Melvas : “Ultraminiaturized pressure sensors for catheter based applications”, Microsystem Technology Department of Signals, Sensors and Systems Royal Institute of Technology (KTH), pp. 18-23 (2002)