Evaluation of Capacitance Changes of Capacitive Micromachined Ultrasonic Transducers for Ultrasonic Diagnoses by Charge-Injection-Reference-Cited by-同舟云学术

Evaluation of Capacitance Changes of Capacitive Micromachined Ultrasonic Transducers for Ultrasonic Diagnoses by Charge-Injection

Published:2018 Issue:2 Volume:138 Page:59-65
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Aono Takanori¹,Yoshimura Yasuhiro¹,Machida Shuntaro²

Affiliation:

1. Research and Development Group, Center for Technology Innovation - Mechanical Engineering, Hitachi, Ltd.

2. Research and Development Group, Center for Technology Innovation - Electronics, Hitachi, Ltd.

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/138/2/138_59/_pdf

Reference13 articles.

1. (1) J. C. Bamber and M. Tristam : “DIAGNOSTIC ULTRASOUND”, The Physics of Medical Imaging, pp. 319-388 (1988)

2. (2) C. Draft, P. Wagner, B. Bymaster, S. Panda, K. Patel, and I. Ladabaum : “cMUTs and electronic for 2D and 3D imaging : Monolithic integrateion, in-handle chip sets and system implications”, Proc. IEEE Ultrasonic Symposium, pp. 467-478 (2005)

3. (3) B. T. Khuri-Yakub and O. Oralkan : “Capacitive micromachined ultrasonic transducers for medical imaging and therapy”, J. Micromech. Microeng., 21, 054004 (2011)

4. (4) A. Sako, H. Tanaka, M. Sato, and T. Nagata : “Optimization of Backside Structures with Wideband Reflectivity Reduction for a CMUT”, Proc. IEEE International Ultrasonic Symposium, 0468 (2015)

5. (5) H. Tanaka, T.Azuma, S. Machida, K. Hashiba, and T. Kobayashi : “Beam Structure for CMUT with Desired Frequency Spectrum”, Proc. IEEE International Ultrasonic Symposium, pp. 500-503 (2008)