Evaluation of Capacitance Changes of Capacitive Micromachined Ultrasonic Transducers for Ultrasonic Diagnoses by Charge-Injection
Author:
Affiliation:
1. Research and Development Group, Center for Technology Innovation - Mechanical Engineering, Hitachi, Ltd.
2. Research and Development Group, Center for Technology Innovation - Electronics, Hitachi, Ltd.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/138/2/138_59/_pdf
Reference13 articles.
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2. (2) C. Draft, P. Wagner, B. Bymaster, S. Panda, K. Patel, and I. Ladabaum : “cMUTs and electronic for 2D and 3D imaging : Monolithic integrateion, in-handle chip sets and system implications”, Proc. IEEE Ultrasonic Symposium, pp. 467-478 (2005)
3. (3) B. T. Khuri-Yakub and O. Oralkan : “Capacitive micromachined ultrasonic transducers for medical imaging and therapy”, J. Micromech. Microeng., 21, 054004 (2011)
4. (4) A. Sako, H. Tanaka, M. Sato, and T. Nagata : “Optimization of Backside Structures with Wideband Reflectivity Reduction for a CMUT”, Proc. IEEE International Ultrasonic Symposium, 0468 (2015)
5. (5) H. Tanaka, T.Azuma, S. Machida, K. Hashiba, and T. Kobayashi : “Beam Structure for CMUT with Desired Frequency Spectrum”, Proc. IEEE International Ultrasonic Symposium, pp. 500-503 (2008)
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