Design and Verification of Quartz Resonators with Quasi-convex Structure
Author:
Affiliation:
1. Graduate School of Information Production and Systems, Waseda University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/134/3/134_47/_pdf
Reference14 articles.
1. (1) C. K. O'Sullivan and G. G. Guilbault : “Commercial quartz crystal microbalances - theory and applications”, Biosens. Bioelectron., Vol. 14, pp. 663-670 (1999)
2. (2) V. N. Hung, T. Abe, P. N. Minh, and M. Esashi : “High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE”, Sensors and Actuators A, Vol. 108, pp. 91-96 (2003)
3. (3) T. Abe and M. Esashi : “One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE”, Sensors and Actuators, Vol. 82, pp. 139-143 (2000)
4. (4) L. Li., M. Esashi, and T. Abe : “A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution”, Appl. Phys. Lett., Vol. 85, pp. 2652-2654 (2004)
5. (5) C. J. Wilson : “Vibration modes of AT-cut convex quartz resonators”, J. Phys. D: Appl. Phys., Vol. 7, pp. 2450-2455 (1974)
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