An Evaluation of the Magnetic Field Characteristics for the Probe Position and Temperature using the Multi-Output MOSFET Sensor by 0.18 µm CMOS Process-Reference-Cited by-同舟云学术

An Evaluation of the Magnetic Field Characteristics for the Probe Position and Temperature using the Multi-Output MOSFET Sensor by 0.18 µm CMOS Process

Published:2023-09-01 Issue:9 Volume:143 Page:300-305
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Suzuki Shinya¹,Harada Tomochika¹

Affiliation:

1. Graduate School of Science and Engineering, Yamagata University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/143/9/143_300/_pdf

Reference14 articles.

1. (1) J. Gubbi, R. Buyya, S. Marusic, and M. Palaniswami : “Internet of Things (IoT): A vision, architectural elements, and future directions”, Future Generation Computer Systems, Vol. 29 (2013)

2. (2) Y. Seo, R. P. Williams, C. A. Stalder, D. Kim, and N. A. Hall : “Micromachined Piezoresistive-Sensed Diaphragms for Infrasonic Monitoring”, IEEE Sensors Journal, Vol. 21, No. 1, pp. 257-264 (2021)

3. (3) H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. G. Korvink, and O. Tabata : “CMOS-MEMS (Advanced Micro and Nanosystems)”, Wiley-VCH, p. 608 (2005)

4. (4) M. Doelle, C. Peters, P. Ruther, and O. Paul : “Piezo-FET Stress-Sensor Arrays for Wire-Bonding Characterization”, Journal of Microelectromechanical Systems, Vol. 15, No. 1, pp. 120-130 (2006)

5. (5) K. Nakano, T. Takahashi, and S. Kawahito : “Sensor array characteristics of MOS Hall-plates and the comparison with split-drain MAGFETs”, IEICE Electronics Express, Vol. 3, No. 13, pp. 328-332 (2006)