レーザパターニングを用いたエレクトレット超音波センサの製作と特性評価
Author:
Affiliation:
1. Saitama University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/143/6/143_102/_pdf
Reference24 articles.
1. (1) F. Gutmann : “The electret”, Reviews of Modern Physics, Vol. 20, No. 3, pp. 457-472 (1948)
2. (2) X. Li, et al.: “Polymer electrets and their applications”, Journal of Applied Polymer Science, Vol. 138, No. 19, app. 50406 (2021)
3. (3) S. Bamji, K. Jao, and M. Perlman : “Polymer electrets corona charged at high temperature”, Journal of Electrostatics, Vol. 6, No. 4, pp. 373-379 (1979)
4. (4) K. Hagiwara, et al.: “Electret charging method based on soft X-ray photoionization for MEMS transducers”, IEEE Transactions on Dielectrics and Electrical Insulation, Vol. 19, No. 4, pp. 1291-1298 (2012)
5. (5) L. McCarty and G. Whitesides : “Electrostatic charging due to separation of ions at interfaces: contact electrification of ionic electrets”, Angewandte Chemie International Edition, Vol. 47, No. 12, pp. 2188-2207 (2008)
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