Fabrication of Aspheric Micro-Lens Mold with High Aspect Ratio -Method to Form Small 3D Structures with an Arbitrary Aspheric Surface and High Aspect Ratio--Reference-Cited by-同舟云学术

Fabrication of Aspheric Micro-Lens Mold with High Aspect Ratio -Method to Form Small 3D Structures with an Arbitrary Aspheric Surface and High Aspect Ratio-

Published:2009 Issue:11 Volume:129 Page:426-429
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Naniwa Irizo¹,Kanamaru Masatoshi²,Nakamura Shigeo²,Shimano Takeshi³,Horino Masaya²

Affiliation:

1. Hitachi, Ltd., Central Research Lab.

2. Hitachi, Ltd., Mechanical Engineering Research Lab.

3. Hitachi Maxell, Ltd., Development & Technology Division

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://www.jstage.jst.go.jp/article/ieejsmas/129/11/129_11_426/_pdf

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5. (5) T. Bourouiua, T. Masuzawa, and H. Fujita : “The MEMSNAS Process: Microloading Effect for Micromachining 3-D Structures of Nearly All Shapes”, J. Microelectromech. Syst., Vol. 3, No. 1, pp. 1-10 (2004)