1. (1) S. D. Senturia : “Microsystem design”, Kluwer Academic Publishers (2001)
2. (2) R. S. Muller, R. T. Howe, S. D. Senturia, R. L. Smith, and R. M. White : “Microsensors”, IEEE Press (1990)
3. (3) Y. B. Gianchandani, O. Tabata, and H. Zappe : “Comprehensive microsystems, 1.07 Wet etching”, Elsevier B.V., pp. 183-216 (2008)
4. (4) Y. B. Gianchandani, O. Tabata, and H. Zappe : “Comprehensive microsystems, 1.08 Dry etching”, Elsevier B.V., pp. 217-234 (2008)
5. (5) Y. Watanabe, M. Maeda, N. Yaji, R. Nakamura, H. Iseki, M. Yamato, T. Okano, S. Hori, and S. Konishi : “Small, soft, and safe microactuator for retinal pigment epithelium transplantation”, Proc. Micro Electro Mechanical Systems Conference, Kobe, Japan, pp. 659-662 (2007)