2-axis Resonant Microstage Using Single Piezoelectric Moonie-type Microactuator
Author:
Affiliation:
1. RICOH Industrial Solutions Inc.
2. Graduate School of Engineering, Tohoku University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/ieejsmas/138/11/138_516/_pdf
Reference15 articles.
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