Mathematical Shape Evaluation of a Concave MEMS Mirror

Author:

Kitagawa Yuma1,Suzuki Yuta1,Tezuka Shin-ichiro1

Affiliation:

1. Yokogawa Electric Corporation

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Reference10 articles.

1. (1) N. Kanbara, S. Tezuka, and T. Watanabe: “MEMS tunable VCSEL with concave mirror using the selective polishing method”, Int. Conf. Optical MEMS Nanophoton., MA3, pp. 9-10 (2006)

2. (2) T. Yano, H. Saitou, N. Kanbara, R. Noda, S. Tezuka, N. Fujimura, M. Ooyama, T. Watanabe, T. Hirata, and N. Nishiyama: “Wavelength modulation over 500kHz of micromechnically tunable InP-based VCSELs with Si-MEMS technology”, IEEE J. Sel. Topics Quantum Electron., Vol. 15, pp. 528-534 (2009)

3. (3) Y. Kitagawa, Y. Suzuki, T. Saruya, K. Tezuka, N. Kanbara, and N. Nishiyama: “1.6 μm to 1.7 μm micromachined tunable VCSELs”, The 33rd SENSOR SYMPOSIUM, 24am2-D-5 (2016) (in Japanese)

4. (4) K. Iga: “Surface-emitting laser-Its birth and generation of new optoelectrics field”, IEEE J. Sel. Topics Quantum Electron., Vol. 6, pp. 1201-1215 (2000)

5. (5) Y. Kitagawa, Y. Suzuki, S. Tezuka, and N. Kanbara: “Polarization Control for MEMS-VCSEL Using Simple Metal Slit”, Int. Conf. Optical MEMS and Nanophoton., Mo3-4, pp. 26-27 (2019)

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