Affiliation:
1. Murata Manufacturing Co., Ltd.
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference17 articles.
1. (1) ????·?? ?·????:???????????,??? (1993)
2. (2) ???????????????:??????????????,??? (1989)
3. (4) ????·????·??????·?? ?:??????????????????????,??? (1992)
4. PZT thin films for microsensors and actuators: Where do we stand?
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