Development of High Reliability and High Accuracy Micro Airflow Sensor for Automobile-Reference-Cited by-同舟云学术

Development of High Reliability and High Accuracy Micro Airflow Sensor for Automobile

Author:

Matsumoto Masahiro¹,Yamada Masamichi¹,Nakano Hiroshi¹,Minamitani Rintarou²,Watanabe Izumi³,Hanzawa Keiji³,Shimada Satoshi⁴

Affiliation:

1. Hitachi Research Lab., Hitachi Ltd.

2. Mechanical Engineering Research Lab., Hitachi Ltd.

3. Automotive Systems, Hitachi Ltd.

4. Hitachi High-Tech Manufacturing & Service Corporation

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

Reference8 articles.

3. (3) 山下彰.坂井裕一.谷本考司.深見達也:「マクロエアフローセンサのセンシング素子」,三菱技報, Vol. 178, No. 6, pp. 11-14 (2004-6)

4. (4) 川島健嗣.香川利春:「非定常流発生器を用いた気体用マスフローメータの特性試験」,Savemation Review「マイクロフローセンサ」特集号, Vol. 19, pp. 36-41 (2001)

5. (5) 田中秀一:「マイクロフローセンサ」チップ製作技術,Savemation Review「マイクロフローセンサ」特集号, Vol. 19, pp. 14-19 (2001)

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