Spontaneous Oscillation due to Electrical Charging Effect in MEMS Electrostatic Switches-Reference-Cited by-同舟云学术

Spontaneous Oscillation due to Electrical Charging Effect in MEMS Electrostatic Switches

Published:2014 Issue:11 Volume:134 Page:338-348
ISSN:1341-8939
Container-title:IEEJ Transactions on Sensors and Micromachines
language:en
Short-container-title:IEEJ Trans. SM

Author:

Chen Yang-Che¹²,Ishida Tadashi³,Toshiyoshi Hiroshi⁴⁵,Chen Rongshun¹,Fujita Hiroyuki⁴

Affiliation:

1. Power Mechanical Engineering Department, National Tsing Hua University

2. Department of MEMS product project, Taiwan Semiconductor Manufacturing Company

3. Graduate School of Science and Technology, Tokyo Institute of Technology

4. Institute of Industrial Science, The University of Tokyo

5. Research Center for Advanced Science and Technology, The University of Tokyo

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/ieejsmas/134/11/134_338/_pdf

Reference32 articles.

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