Affiliation:
1. Department of Electronics, Tohoku Gakuin University
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Reference7 articles.
1. (1) R. Puers, S. Reyntjens, and D. De Bruyker : “The Nano Pirani—an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping”, Sensors and Actuators A: Physical, Vol. 97-98, pp. 208-214 (2002)
2. Microheater and microbolometer using microbridge of SiO2 film on silicon
3. (3) A. W. Van Herwaarden, P. M. Sarro, and H. C. Meijer : “Integrated vacuum sensor”, Sensors and Actuators, Vol. 8, No. 3, pp. 187-196 (1985)
4. (4) M. Kimura and K. Toshima : “Thermistor-like pn junction temperature-Sensor with variable sensitivity and its combination with a micro air-bridge heater”, Sensors and Actuators, A108, pp. 239-243 (2003)
5. (5) M. Kimura, F. Sakurai, H. Ohta, and T. Terada : “Proposal of A New Structural Thermal Vacuum Sensor with Diode-thermistors Combined with a Micro-Air-Bridge Heater”, Microelectronics J., Vol. 38, pp. 171-176 (2007)