Affiliation:
1. Eindhoven University of Technology, Mechanical Engineering
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering,Energy Engineering and Power Technology,Automotive Engineering
Reference53 articles.
1. (1) H. Butler: “Position Control in Lithographic Equipment: An Enabler for Current-Day Chip Manufacturing”, IEEE Control Systems Magazine, Vol. 31, No. 5, pp. 28-47 (2011)
2. (2) J. Freudenberg, R. Middleton, and A. Stefanpoulou: “A survey of inherent design limitations”, In Proceedings of the American Control Conference, Chicago, Illinois, pp. 2987-3001 (2000)
3. (3) M. M. Seron, J. H. Braslavsky, and G. C. Goodwin: Fundamental Limitations in Filtering and Control, Springer-Verlag, London (1997)
4. (4) A. Feuer, G. C. Goodwin, and M. Salgado: “Potential benefits of hybrid control for linear time invariant plants”, In Proceedings of the American Control Conference, Albuquerque, New Mexico, USA, pp. 2790-2794 (1997)
5. (5) Z. Zin, M. Pachter, and S. Ban: “Toward improvement of tracking performance—nonlinear feedback for linear systems”, International Journal of Control, Vol. 70, No. 1, pp. 1-11 (1998)
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