Electrostatic Neutralization Characteristics of an AC-corona-discharge-type Ionizer in Mixed N2-O2, N2-SF6 Atmosphere-Reference-Cited by-同舟云学术

Electrostatic Neutralization Characteristics of an AC-corona-discharge-type Ionizer in Mixed N₂-O₂, N₂-SF₆ Atmosphere

Published:2016 Issue:1 Volume:136 Page:33-40
ISSN:0385-4205
Container-title:IEEJ Transactions on Fundamentals and Materials
language:en
Short-container-title:IEEJ Trans. FM

Author:

Nemoto Daisuke¹,Kristanto Yudi¹,He Wanting¹,Matsuo Takeshi¹,Sato Naoyuki¹,Okano Kazuo²,Ikehata Takashi¹

Affiliation:

1. Institute of Applied Beam Science, Graduate School of Science & Engineering, Ibaraki University

2. Department of Electrical Engineering, The Polytechnic University

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering

Link

https://www.jstage.jst.go.jp/article/ieejfms/136/1/136_33/_pdf

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3. (5) H. Inaba, S. Sakata, T. Yoshida, T. Okada, and T. Ohmi : “Neutralization of Wafer Charging in Nitrogen Gas”, IEEE Trans. Semicond. Manuf., Vol. 5, No. 4, pp. 359-367 (1992)

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5. (7) J. D. Skalny, J. Orszagh, N. J. Mason, J. A. Rees, Y. A. Gonzalvo, and T. D. Whitmore : “Mass spectrometric study of negative ions extracted from point to plane negative corona discharge in ambient air at atmospheric pressure”, Int. J. Mass Spectrom., Vol. 272, No. 1, pp. 12-21 (2008)