Capacitively Coupled RF Discharge Breakdown in Gas Mixtures-Reference-Cited by-同舟云学术

Capacitively Coupled RF Discharge Breakdown in Gas Mixtures

Published:2007 Issue:11 Volume:127 Page:714-718
ISSN:0385-4205
Container-title:IEEJ Transactions on Fundamentals and Materials
language:en
Short-container-title:IEEJ Trans. FM

Author:

Sasaki Norihiko¹,Shoji Masafumi²,Uchida Yutaka³

Affiliation:

1. Miyagi National College of Technology

2. Wacom R&D CO., LTD.

3. Industrial and Power Systems & Service Company, Toshiba Corporation

Publisher

Institute of Electrical Engineers of Japan (IEE Japan)

Subject

Electrical and Electronic Engineering

Link

http://www.jstage.jst.go.jp/article/ieejfms/127/11/127_11_714/_pdf

Reference15 articles.

1. Low-pressure gas breakdown in combined fields

2. Breakdown measurement of a capacitive radio frequency discharge with insulated electrode

3. Rf breakdown of low-pressure gas and a novel method for determination of electron-drift velocities in gases

4. (4) P. F. Clanoy, J. L. Clark, and R. G. Earl : “Electrodeless r.f. discharges in mercury-argon and mercury-argon-nitrogen gas mixtures”, 2nd Int. Conf. on Gas Discharge, pp. 254-256 (1972)

5. (5) N. Sasaki, Y. Uchida, and M. Sato : “Breakdown characteristics of rf capacitive discharges in argon-nitrogen mixture”, Ext. Absts. of ICRP-4/SPP-16, pp. 83-84 (1998)

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