1. (3) J. Otsuka, S. Hayama, and Y. Ohashi: “Present and Future Technologies of Precision and Ultraprecision Positioning”, JSPE, Vol. 67, No. 2, pp. 173-178 (2001) (in Japanese)
2. (4) O. Horiuchi: “Speed Up of Precision/Ultraprecision—Ball Screw vs. Linear Motor—”, JSPE, Vol. 67, No. 2, pp. 179-183 (2001) (in Japanese)
3. (5) S. Futami: “Recent trend of control algorithmsand power amplifiers for precise and ultra-precise positioning”, JSPE, Vol. 67, No. 2, pp. 184-187 (2001) (in Japanese)
4. (7) N. Takigawa, M. Yamamoto, K. Ito, M. Iwasaki, and N. Matsui: “Disturbance Estimation and Modeling by Iterative Learning Process”, The Papers of Technical Meeting on Industrial Instrumentation and Control, IEE Japan, IIC-07-49 (2007) (in Japanese)
5. (8) A. Nagamatsu: “Introduction to Modal Analysis”, Corona publishing (1993) (in Japanese)