High Precision Laser Drawing System Using Cooperation Control of Low-Precision Pulse-Stages and Piezo-Stage
Author:
Affiliation:
1. Toyohashi University of Technology
2. Aichi University of Technology
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Link
https://www.jstage.jst.go.jp/article/ieejeiss/124/10/124_10_2123/_pdf
Reference8 articles.
1. (1) K. E. Wilson, C. T. Mueller, and E. M. Garmire : “Laser writing of masks for integrated optical circuits”, IEEE Trans. On Components, Hybrids, and Manufacturing Tech., Vol. CHMT-5, No. 2, pp. 202-2-4 (1982)
2. (2) M. Haruna, Y. Murata, and H. Nishihara : “Laser beam direct writing of TiO2 channels for fabrication of Ti: LiNbO3 waveguides”, Jpn. J. Appl. Phys., Vol. 31, Part 1, No. 5B, pp. 1593-1596 (1992)
3. (3) H. Onda, A. Asahara, and S. Fujii : “Development of laser beam writer”, J. of Japan Society for Precision Eng., Vol. 58, No. 11, pp. 1837-1842 (1992) (in Japanese)
4. Development of Laser Beam Writer.
5. (4) N. Goto and Y. Miyazaki : “Precise control method in laser drawing system for patterning of integrated-optic switching circuits”, Tech. Group of IEICE Japan, OCS95-80, pp. 21-28 (1995) (in Japanese)
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