Author:
MACHIDA Shuntaro,TANAKA Hiroki
Publisher
Institute of Electrical Engineers of Japan (IEE Japan)
Subject
Electrical and Electronic Engineering
Reference13 articles.
1. (1) F. L. Degertekin:“Microscale Systems Based on Ultrasonic MEMS-CMOS Integration”, in Proc. IEEE TRANSDUCERS 2017, pp.397-401(2017)
2. (2) Y. Qiu, J. V. Gigliotti, M. Wallace, F. Griggio, C. E. M. Demore, S. Cochran, and S. Trolier-McKinstry:“Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging”, Sensors 2015, Vol.15, pp.8020-8041(2015)
3. (3) D. M. Mills:“Medical Imaging with Capacitive Micromachined Ultrasound Transducer (cMUT) Arrays”, in Proc. 2004 IEEE Ultrasonics Symposium, pp.384-390(2004)
4. (5) X. Jiang, H.-Y. Tang, Y. Lu, E. J. Ng, J. M. Tsai, B. E. Boser, and D. A. Horsley:“Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry”, IEEE Trans. Ultrason., Ferroelect., Freq. Cntr., Vol.64, No.9, pp.1401-1408(2017)
5. (6) Z. Liu, S. Yoshida, T. Horie, S. Okamoto, R. Takayama, and S. Tanaka:“Characterization of Epitaxial-PZT/Si Piezoelectric Micromachined Ultrasonic Transducer (pMUT) and Its Phased Array System”, in Proc. IEEE TRANSDUCERS 2019, pp.246-249(2019)