Study the optimum dimensions and operating parameters of Penning ion source

Abstract

In this work, design and construction of a DC cold cathode Penning ion source is described. It consists of cylindrical hollow anode and two movable disc cathodes that are placed symmetrically at two ends of the anode. The electrical discharge and the output ion beam characteristics of the ion source are measured using argon gas. It is found that the optimum dimensions of anode–cathode distance, ion exit aperture diameter, and ion exit aperture – Faraday cup distance are equal to 8, 1.5, and 30 mm, respectively. The ion source efficiency was calculated at discharge current equal to 1.2 mA, different anode–cathode distances and pressures using argon gas. It is found that at anode–cathode distance equal to 8 mm and pressure equal to 7 × 10−4 mmHg, a maximum ion source efficiency equal to 27.1% can be obtained. The surface hardness of molybdenum specimen is measured after exposure to argon ion beam for two hours at pressure equal to 7 × 10−4 mmHg, discharge voltage equal to 3.5 kV, discharge current equal to 0.6 mA, and output ion beam current equal to 165 μA using argon gas. It is found that the surface hardness of molybdenum specimen is decreased by a factor of 24.2%.