Effet d'une pulvérisation de l'antimoine dans le a-Si: H

Abstract

Cathode-sputtering of antimony in a-Si:H yields an amorphous film more conductive than intrinsic a-Si:H. A rapid annealing of the film allows us to increase its conductivity and to observe a dehydrogenation by infrared absorption measurements and by the elastic recoil detection technique. The latter method also gave us a precise analysis of the chemical composition of the amorphous film.[Journal translation]