Abstract
Various techniques for use in spectral narrowing and tuning of excimer laser oscillators are described. Intracavity dispersive elements include Littrow grating, grazing-incidence grating, prisms, and Fabry–Perot etalons. Recent developments to improve overall efficiency and reduce broadband noise are outlined.
Publisher
Canadian Science Publishing
Subject
General Physics and Astronomy
Cited by
41 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献