Two-dimensional numerical simulations of electrothermal behaviour in very large scale integrated contacts and vias

Abstract

We present results of electrothermal interactions in fine geometry contacts and vias. The results have been obtained using a two-dimensional model based on the finite-box procedure. For the contact geometry, large electric potential gradients and consequently high Joule-heating effects develop at the interface, which is relatively low in electrical conductivity. In the case of the via, however, temperature escalations result from singularities in the electric field at geometrically imperfect locations, owing to inadequate step coverage in the metallization process. In particular, we discuss the treatment of boundary conditions for the temperature equation.