Effect of film thickness on the physical properties of ZnO:Al thin films deposited using a spray pyrolysis technique

Abstract

ZnO:Al(ZAO) films with various amount of solution, in the range 10–120 mL, were prepared on a glass substrate. Deposition was carried out using a spray method, and the substrate temperature was held at 500 °C. It was found that increasing the amount of solution causes the ZnO:Al thin films to exhibit a strong orientation along (002). The variation in the structural properties due to variation in the volume of solution was investigated by means of X-ray diffraction. The lowest sheet resistance obtained was 40 Ω/cm2 for a 120 mL solution. PACS Nos.: 73.61.–r, 78.20.–e