Affiliation:
1. Département de Physique, Université de Montréal, C.P. 6128, Montréal, Québec
Abstract
A plasma produced by a helical RF structure of the Lisitano type is investigated. Measurements of electron density, electron temperature, and plasma stability are reported as a function of RF frequency and power, magnetic field strength and geometry, and neutral argon pressure. It is concluded that at moderate power (~20 W), electron cyclotron resonance is important in the power absorption process.
Publisher
Canadian Science Publishing
Subject
General Physics and Astronomy
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献