Depth distributions of heavy ions in LiNbO3 and KTiOPO4 at tilted angle implantation

Abstract

200 keV Hg and 1000 keV Xe ions were implanted into LiNbO3 and KTiOPO4 at a tilted angle. The depth distributions of Hg and Xe ions in LiNbO3 and KTiOPO4 were measured by Rutherford backscattering of MeV He ions. The experimental ion distributions are compared with the transport of ions in matter (TRIM'89) simulation. The result shows a slight difference in the peak position between the experimental and theoretical ion distribution, but the form of the experimental ion distribution is found to be in agreement with the theoretical one predicted by TRIM'89 except for a different width in the case of LiNbO3. The FWHM (full width at half maximum) of the experimental ion distribution is larger than the theoretical one given by TRIM'89 in the case of KTiOPO4. The lateral spreads obtained are compared using different calculation procedures.