Hydrogen-assisted reactive evaporation of quasi-stoichiometric polycrystalline InSb films
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Published:1992-05-01
Issue:5
Volume:70
Page:319-321
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ISSN:0008-4204
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Container-title:Canadian Journal of Physics
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language:en
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Short-container-title:Can. J. Phys.
Author:
Leclerc G.,Beerens J.,Aktik C.,Paquin L.,Isai M.
Abstract
We report here a new technique for evaporating polycrystalline InSb films, using hydrogen beams as carriers for each elemental source. The films obtained show X-ray diffraction patterns before annealing that are totally exempt from impurity peaks, unlike those other workers have previously reported for evaporated InSb.
Publisher
Canadian Science Publishing
Subject
General Physics and Astronomy