Dissociative excitation of CF4 by controlled electron impact

Abstract

Dissociative excitation of CF4 by electron impact has been studied under single-collision conditions for incident energies up to 600 eV. The emission spectrum in the range 50–130 nm shows many features arising from neutral and singly ionized fluorine and carbon fragments. Absolute cross sections for the observed features were measured at 200 eV incident energy, while the excitation functions of the most intense emissions were studied over the whole energy range. Cascade was shown to be the dominant excitation mechanism for some of these features.