Abstract
The ion bombardment of silicon results in the formation of an amorphous phase in the vicinity of the bombarded regions. This gives rise to a milky appearance which is easily distinguishable from an adjacent unbombarded region. Experiments are described which were designed specifically to study the influence of bombardment temperature and channeling on the formation of this phase.
Publisher
Canadian Science Publishing
Subject
General Physics and Astronomy
Cited by
50 articles.
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