Evaluation of (Bi,La)4Ti3O12 Thin Film Capacitor Fabricated on a Sub-micron Bottom Electrode in a FeRAM Device
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Published:2011-01-14
Issue:1
Volume:58
Page:132-137
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Author:
Kim Nam-Kyeong,Yeom Seung-Jin,Hong Suk-Kyoung,Kang Hee-Bok,Kweon Soon-Yong
Publisher
Korean Physical Society
Subject
General Physics and Astronomy