Effect of Interfacial Strain in Wet Oxidation Kinetics on Si(100)
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Published:2011-04-15
Issue:4(1)
Volume:58
Page:920-923
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Author:
Mun Bongjin Simon,Rossi Massimiliano,Enta Yoshiharu
Publisher
Korean Physical Society
Subject
General Physics and Astronomy