Offset-Gated Poly-Si TFTs Using in-situ Fluorine Passivation and Excimer Laser Doping
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Published:2000-12-01
Issue:6
Volume:37
Page:866
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phys. Soc.
Author:
Sang-Hoon Jung,Cheon-Hong Kim,Juhn-Suk Yoo,Min-Koo Han
Publisher
Korean Physical Society
Subject
General Physics and Astronomy