Pulsed Inductively-Coupled Plasma Doping of Phosphorus for N+-P Junction Fabrication
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Published:2009-05-15
Issue:5(1)
Volume:54
Page:1844-1847
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Author:
Kim Kee-Man,Lee Won-Jun,Lee Sang-Wook,Lee Young Jong,Lee Youn-Seoung,Rha Sa-Kyun
Publisher
Korean Physical Society
Subject
General Physics and Astronomy